High Vacuum Bake-Out System for Critical Components Internal Heated Platen

Manufacturer of semiconductor components required a cost-effective high temperature bake-out system to operate below 10-5 Torr for critical components. We engineered a high vacuum bake-out system using the more cost-effective valve logic in lieu of a gate valve on the turbo pump. Vacuum chamber based on our standard Series HH 12" X 18" vacuum chamber.

  • Fully integrated vacuum system mounted on mobile cart 
  • Cost-effective alternative to gate valves
  • Horizontal/front loading chamber with full access swing hinge door and quick door clamp closures
  • Custom ports with multiple feedthroughs
Chamber Dimensions:
12" DIA x 18" L
Vacuum Chamber:
Series HH Horizontal High Vacuum Chamber
Vacuum Rating:
10-7 Torr
Chamber Material:
304 Stainless Steel
Door Material:
304 Stainless Steel
Door Configuration:
Butterfly hinge
Seal:
O-ring
Temperature Range:
+200º C
Finish:
Glass bead blast finish interior and exterior
Controller:
HC-1000 Temperature Controller
Heat/Cooling Type:
Electric heaters attached to platen system
Pumping System:
Dry scroll pump and turbo molecular pump


No accessories available.

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