Semiconductor company required a vacuum system to move parts in and out of a clean environment. The customer part (a welding enclosure purged with nitrogen) required an interlocked system so the part can pass through the chamber without compromising the nitrogen purge. 

We engineered a custom vacuum system with a custom cube chamber featuring dual doors (room side door and weld side door) with proximity sensors and interlocks to ensure a clean environment. When the part enters the chamber through the room side door, the chamber evacuates to 0.1 Torr and is then backfilled with nitrogen. 

  • Dual door chamber includes proximity sensors and interlocks to prevent both doors from being open at the same time
  • VC-2500 Vacuum Controller 
  • Nitrogen backfill port  and pressure relief port
Chamber Dimensions:
12" H x 12" W x 18" L Cube (Internal Dimensions)
 Custom Series CH LVC121218-3322-CH
Chamber Material:
304 Stainless Steel
Door Material:
304 Stainless Steel
Buna O-ring
Vacuum Port:
NW 25
Vent Port:
NW 25
Gauge Port
NW 16
Door Configuration:
Plate hinge
Vacuum Rating:
1 x 10-3 Torr
Door Style:
Flat plate
VC-2500 Vacuum Controller
Pumping System:
W2V40 LACO two-stage oil-sealed rotary vane high vacuum pump

No accessories available.

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