Custom Thermal Vacuum System - X-1P34005 Custom Thermal Vacuum System - X-1P34005 Custom Thermal Vacuum System - X-1P34005 Custom Thermal Vacuum System - X-1P34005

An innovative and leading manufacturer of Semiconductor Products required a large volume, high vacuum system capable of testing its products using customized and repeatable test requirements, unique and varying test recipes, and robust data logging.

Our talented engineers designed a custom system that utilizes a custom 30“ Cube High Vacuum Chamber with numerous ports, feedthroughs, ruggedized mobile cart, and a powerful pump package. Entire system process is controlled by the feature-packed VC-3500 Vacuum Controller, providing automated vacuum and temperature control, and customizable test recipes for unique testing requirements.

  • Chamber Configuration: 30” cube high-vacuum, stainless steel chamber with 6-inch glass viewport, and internal LED lighting
  • Chamber Ports: NW16, NW25, NW40, CF100 , CF200 (2x) and CF2.75 (4x)
  • Process Controller: Programmable test recipes and data logging for vacuum and pressure via the VC-3500 process controller
  • System Configuration: Fully enclosed system control panel, vacuum chamber, and vacuum controller mounted on ruggedized mobile cart with locking swivel casters
  • Pump Package: Dry scroll pump (36 CFM) and high-vacuum turbo pump
Chamber Dimension:
30" x 30" x 30" | Series CH Cube High Vacuum Chamber
Chamber Material:
304 Stainless steel w/swing hinge stainless steel door
Vacuum Rating:
 1 x 10-7 Torr
Seal:
Buna O-ring
 Ports:
NW16, NW25, NW40, CF100 , CF200 (2x) and CF2.75 (4x)
Leak Rate:
1 x10-8 atm cc/sec (helium)
Approximate Volume (in3):
27,000
Controller:
VC-3500  Vacuum Controller
Pumping package:
Dry, oil-free, roughing pump (36 CFM) and high-vacuum turbo pump
Cart:
Carbon steel (painted) with locking swivel casters
System Power:
240 VAC | 60Hz | 3 phase
No accessories available.

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