ISP-90 3.8 CFM Dry Scroll Vacuum Pump

SKU: AIISP-90

$6,250.00

MSRP:

Lead times may vary, email info@lacotech.com to confirm availability.

ISP-90 3.8 CFM Dry Scroll Vacuum Pump - pumping speed

The ISP-90 3.8 CFM Dry Scroll Vacuum Pump is used in the TITAN VERSA LD leak detector.

ANEST IWATA was the first in the world to develop the air-cooled, oil-free, scroll-type vacuum pumps. These oil-free, scroll vacuum pumps are compact and emit less noise and vibration than other dry vacuum pumps. They are highly valued by customers who need clean, high quality vacuum, especially in the analytical and semiconductor related fields.

The ISP series of vacuum pumps offer a clean vacuum environment and eliminate the nuisance of cumbersome lubricant maintenance or sealing water administration. The ISP series is free from installation restrictions because of its air-cooled system. ISP vacuum pumps maintain low power consumption from atmosphere to maximum pressure.

Features

ISP scroll pumps are equipped with dry vacuum system without using lubricating oil or sealing water
No gears result in no need to exchange of gear oil and no risk of leaked lubricating oil
Easy – maintenance available
Generated clean vacuum keeps installation area clean
Equipped cooling system frees from the trouble of controlling cooling water and selecting installation site
Excellence in displacing water vapor
Reliable Design – Little power variance between atmospheric pressure and the ultimate pressure allows repeated continuous operation between atmospheric pressure and vacuum
Excellence in energy-savings in vacuum area. 24 hrs operations secure

All prices are in US$. Website pricing is good only for the USA. Please call for International pricing.

Precautions for Dry Scroll Vacuum Pumps

Evacuation Gases
This pumping system is suitable for clean processes only. Do not use explosive, flammable, toxic or corrosive substances or substances, which contain chemicals, solvents or particles. LACO will not perform maintenance work on pumps which have used hazardous substances.
Ambient Temperature
Use at ambient operation temperature in the range of 5°C to 40°C.

Pumping Speed

Applications

Sputtering equipment, Vacuum deposition equipment, Ion plating equipment
Accelerator, Synchrotron Radiation
Surface modification, Electron beam process
Gas recovery devices
Vacuum equipment
Leak detectors
Device handling system
Vacuum furnace, Heat treatment furnace
Laboratory use
Vacuum packaging machine

Resources

Pumping Speed @ 50 Hz	90 L/min \| 3.2 CFM
Pumping Speed @ 60 Hz	108 L/min \| 3.8 CFM
Ultimate Pressure	≤ 5 Pa \| ≤ 3.7 x 10⁻² Torr
Motor Power	150 W
Voltage	100 V, 115 V, 200 V, or 230 V (50/60 Hz)
Noise Level	≤ 52 dB(A)
Noise Level at Air-Flush	≤ 57 dB(A)
Weight	14 kg \| 30.86 lb
Leak Tightness	≤ 1.0 x 10⁻⁵ Pa x m³/s ≤ 7.5 x 10⁻⁸ Torr x L/s
Water Vapor Capacity	5 g/day \| 0.176 oz/day
Air Flush	9 L/min \| 0.32 CFM
Intel Connection	NW25
Outlet Connection	NW16
Ambient Operating Temperature	5° C - 40° C \| 41° F - 104° F