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Custom Solution | High Vacuum System for Semiconductor Product Manufacturing
PART NUMBER:
X-1P34005
An innovative and leading manufacturer of Semiconductor Products required a large volume, high vacuum system capable of testing its products using customized and repeatable test requirements, unique and varying test recipes, and robust data logging.
Our talented engineers designed a custom system that utilizes a custom 30“ Cube High Vacuum Chamber with numerous ports, feedthroughs, ruggedized mobile cart, and a powerful pump package. Entire system process is controlled by the feature-packed VC-3500 Vacuum Controller, providing automated vacuum and temperature control, and customizable test recipes for unique testing requirements.
KEY FEATURES
- Chamber Configuration: 30” cube high-vacuum, stainless steel chamber with 6-inch glass viewport, and internal LED lighting
- Chamber Ports: NW16, NW25, NW40, CF100 , CF200 (2x) and CF2.75 (4x)
- Process Controller: Programmable test recipes and data logging for vacuum and pressure via the VC-3500 process controller
- System Configuration: Fully enclosed system control panel, vacuum chamber, and vacuum controller mounted on ruggedized mobile cart with locking swivel casters
- Pump Package: Dry scroll pump (36 CFM) and high-vacuum turbo pump
SPECIFICATIONS
| Chamber Dimension: | 30″ x 30″ x 30″ | Series CH Cube High Vacuum Chamber |
| Chamber Material: | 304 Stainless steel w/swing hinge stainless steel door |
| Vacuum Rating: | 1 x 10-7 Torr |
| Seal: | Buna O-ring |
| Ports: | NW16, NW25, NW40, CF100 , CF200 (2x) and CF2.75 (4x) |
| Leak Rate: | 1 x10-8 atm cc/sec (helium) |
| Approximate Volume (in3): | 27,000 |
| Controller: | VC-3500 Vacuum Controller |
| Pumping package: | Dry, oil-free, roughing pump (36 CFM) and high-vacuum turbo pump |
| Cart: | Carbon steel (painted) with locking swivel casters |
| System Power: | 240 VAC | 60Hz | 3 phase |
ACCESSORIES
No accessories available.
RESOURCES
Vacuum System Solutions
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