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Custom Solution | Cube Vacuum Chamber for Semiconductor Manufacturing
PART NUMBER:
X-1P34317
An innovative manufacturer of Semi Conductors required a custom High Vacuum Cube Chamber with front-loading, hinged door capable of testing its products
LACO’s talented engineers designed a custom system that utilizes our 40“ Cube High Vacuum Chamber with numerous ports and feedthroughs, 6″ ISO Borosilicate glass view and support feet for mounting on a tabletop or customized LACO cart.
LACO’s talented engineers designed a custom system that utilizes our 40“ Cube High Vacuum Chamber with numerous ports and feedthroughs, 6″ ISO Borosilicate glass view and support feet for mounting on a tabletop or customized LACO cart.
KEY FEATURES
- Chamber Configuration: 36” cube high-vacuum, stainless steel chamber with 6-inch glass viewport
- Chamber Ports: NW25, NW40, ISO160, and CF2.75
- System Configuration: Carbon steel (painted) mobile cart with locking swivel casters
- System Platform: Left-hand, front-loading design with support feet for mounting on a tabletop or customized LACO cart
SPECIFICATIONS
| Chamber Dimension: | 36″ W x 36″ H x 36″ D | Series CH Cube High Vacuum Chamber |
| Chamber Material: | 304 Stainless steel w/swing hinge stainless steel door |
| Approximate Volume (in3): | 46,656 |
| Vacuum Rating: | 1 x 10-5 Torr |
| Chamber Seal: | Viton O-ring |
| Chamber Ports: | NW25, NW40, ISO160, CF 2.75 |
| Viewports: | 6” Borosilicate glass |
| Leak Rate: | 1 x10-8 atm cc/sec (helium) |
| Pumping package: | Leybold Turbovac 450i Turbo and Rough/backing pump |
| Cart: | Carbon steel (painted) with locking swivel casters |
| System Power: | 120 VAC | 60Hz | Single phase | 20 amp breaker |
ACCESSORIES
No accessories available.
RESOURCES
TITAN VERSA Helium Leak Detector User Manual
