Vacuum Oven System for Semiconductor Processing Rated to 240° C

SKU:

X-1P34039

A manufacturer of semiconductor products required a vacuum oven for component processing.

Based on our standard LVO Series 20″ Cube Vacuum Oven, LACO’s team of engineers configured a Custom Vacuum Oven with the options to meet our customer’s requirements, including two internally heated aluminum shelves that provide direct and uniform temperature control through conductance heating of the shelf and customer part.

The oven features our HVC-3500 thermal vacuum oven controller, allowing the operator complete control of temperature setpoints, hold time and test recipes.

Vacuum Oven System for Semiconductor Processing Rated to 240° C

Vacuum Oven System for Semiconductor Processing Rated to 240° C image 1

Vacuum Oven System for Semiconductor Processing Rated to 240° C image 2

Vacuum Oven System for Semiconductor Processing Rated to 240° C image 3

Vacuum Oven System for Semiconductor Processing Rated to 240° C image 4

IndustriesSemiconductor

System Platform: Cube style LVO Series 20″ Cube Vacuum Oven configuration with stainless steel chamber
Process Controller: Programmable test recipes and data logging for vacuum, pressure, and temperature via HVC-3500 process controller
System Enclosure: Fully integrated and enclosed system mounted on powder-coated steel benchtop frame with casters
Shelf: Two 19” W x 19” L adjustable aluminum heated shelves
Pump Package: Dry scroll pump and high vacuum turbo pump

Chamber Dimensions:	20″ W x 20″ L x 20″ H
Chamber Material:	Stainless steel w/hinged stainless steel door
Chamber Seal:	Buna O-ring
Approximate Volume (in³):	8,000
Vacuum Rating:	760 – 7.5 x 10^-6 Torr
Temperature Rating:	240 °C
Ports:	NW16 (gauge) \| NW25 (rough vacuum, vent, gauge. purge) \| ISO100 (high vacuum) \| power/RTD with feedthrough pins
Leak Rate:	1 x10^-8 atm cc/sec (helium)
Controller:	HVC-3500 thermal vacuum controller \| 7” color touchscreen \| dual overtemperature gauges
Pump Package:	Dry scroll pump (8.5 CFM) and high-vacuum turbo pump
Power:	240 VAC, 1 phase

HVC-3500 Thermal Vacuum Controller

For ultimate flexibility and control of your vacuum system, the feature-packed HVC-3500 Thermal Vacuum Controller provides automated vacuum and temperature control, customizable software, and adjustable test recipes for your unique and complex vacuum processes. The HVC-3500 is ideal for any vacuum system requiring heating or cooling, and integrates vacuum gauges and valves for either automated mode or interlocked manual mode operation.

IndustriesSemiconductor

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