Manufacturer of semiconductor components required a cost-effective high temperature bake-out system to operate below 10-5 Torr for critical components. We engineered a high vacuum bake-out system using the more cost-effective valve logic in lieu of a gate valve on the turbo pump. Vacuum chamber based on our standard Series HH 12″ X 18″ vacuum chamber.
| Chamber Dimensions: | 12″ DIA x 18″ L |
| Vacuum Chamber: | Series Horizontal High (HH) Vacuum Chamber |
| Vacuum Rating: | 10-7 Torr |
| Chamber Material: | 304 Stainless Steel |
| Door Material: | 304 Stainless Steel |
| Door Configuration: | Butterfly hinge |
| Seal: | O-ring |
| Temperature Range: | +200º C |
| Finish: | Glass bead blast finish interior and exterior |
| Controller: | HC-1000 Temperature Controller |
| Heat/Cooling Type: | Electric heaters attached to platen system |
| Pumping System: | Dry scroll pump and turbo molecular pump |
Designed for simple, trouble-free temperature control of LACO vacuum systems, the HC-1000 Temperature Controller is ideal for vacuum ovens and thermal systems with associated equipment such as heating elements, thermocouples and vacuum feedthroughs. With standard FM approved over-temperature protection, the HC-1000 features a main power disconnect and quick start or stop of the heating process via a selector switch on the front panel. The controller is housed in a Nema 4 enclosure and utilizes digital PID control technology with solid state relays.
For manual or auto heat control, automated thermal cycles and ramp rates, heat setpoint PID control (up to 2 zones), and multiple temperature reading display, upgrade to the HVC-2500.
For fully customizable software for heating and cooling control, automated thermal cycles and ramp rates, heat setpoint PID control for multiple zones, and multiple temperature reading display, upgrade to the HVC-3500.
This 12″ DIA x 18″ L Horizontal High (HH) vacuum chamber is designed for applications that require high vacuum performance with convenient front-loading access. The cylindrical stainless steel chamber features a hinged door with an O-ring seal, allowing quick loading and secure sealing during testing or processing.
Built from glass bead blasted 304 stainless steel, the chamber supports vacuum levels down to 1 x 10⁻⁶ Torr when paired with an appropriate pumping system. Standard vacuum, vent, and gauge ports simplify integration into laboratory, R&D, and production environments, while helium leak testing ensures reliable performance and repeatable results.
