High Vacuum Bake-Out System for Critical Components

SKU:

X-1P18118

Manufacturer of semiconductor components required a cost-effective high temperature bake-out system to operate below 10^-5 Torr for critical components. We engineered a high vacuum bake-out system using the more cost-effective valve logic in lieu of a gate valve on the turbo pump. Vacuum chamber based on our standard Series HH 12″ X 18″ vacuum chamber.

High Vacuum Bake-Out System for Critical Components

High Vacuum Bake-Out System for Critical Components image 1

High Vacuum Bake-Out System for Critical Components image 2

IndustriesAerospace Defense Electronics Laboratory / R&D Vacuum Technology

Fully integrated vacuum system mounted on mobile cart
Cost-effective alternative to gate valves
Horizontal/front loading chamber with full access swing hinge door and quick door clamp closures
Custom ports with multiple feedthroughs

Chamber Dimensions:	12″ DIA x 18″ L
Vacuum Chamber:	Series Horizontal High (HH) Vacuum Chamber
Vacuum Rating:	10^-7 Torr
Chamber Material:	304 Stainless Steel
Door Material:	304 Stainless Steel
Door Configuration:	Butterfly hinge
Seal:	O-ring
Temperature Range:	+200º C
Finish:	Glass bead blast finish interior and exterior
Controller:	HC-1000 Temperature Controller
Heat/Cooling Type:	Electric heaters attached to platen system
Pumping System:	Dry scroll pump and turbo molecular pump

HC-1000 Temperature Controller

Designed for simple, trouble-free temperature control of LACO vacuum systems, the HC-1000 Temperature Controller is ideal for vacuum ovens and thermal systems with associated equipment such as heating elements, thermocouples and vacuum feedthroughs. With standard FM approved over-temperature protection, the HC-1000 features a main power disconnect and quick start or stop of the heating process via a selector switch on the front panel. The controller is housed in a Nema 4 enclosure and utilizes digital PID control technology with solid state relays.

Need more Control options?

For manual or auto heat control, automated thermal cycles and ramp rates, heat setpoint PID control (up to 2 zones), and multiple temperature reading display, upgrade to the HVC-2500.

For fully customizable software for heating and cooling control, automated thermal cycles and ramp rates, heat setpoint PID control for multiple zones, and multiple temperature reading display, upgrade to the HVC-3500.

12″ X 18″ Horizontal High (HH) Vacuum Chamber (Hinged Door with O-ring)

The 12″ DIA x 18″ L HH Series vacuum chamber features a high vacuum performance with a convenient front-loading design and a hinged door with O-ring.

IndustriesAerospace Defense Electronics Laboratory / R&D Vacuum Technology

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