An innovative and leading manufacturer of Semiconductor Products required a large volume, high vacuum system capable of testing its products using customized and repeatable test requirements, unique and varying test recipes, and robust data logging.
Our talented engineers designed a custom system that utilizes a custom 30“ Cube High Vacuum Chamber with numerous ports, feedthroughs, ruggedized mobile cart, and a powerful pump package. Entire system process is controlled by the feature-packed VC-3500 Vacuum Controller, providing automated vacuum and temperature control, and customizable test recipes for unique testing requirements.
| Chamber Dimension: | 30″ x 30″ x 30″ | Series CH Cube High Vacuum Chamber |
| Chamber Material: | 304 Stainless steel w/swing hinge stainless steel door |
| Vacuum Rating: | 1 x 10-7 Torr |
| Seal: | Buna O-ring |
| Ports: | NW16, NW25, NW40, CF100 , CF200 (2x) and CF2.75 (4x) |
| Leak Rate: |
1 x10-8 atm cc/sec (helium) |
| Approximate Volume (in3): | 27,000 |
| Controller: | VC-3500 Vacuum Controller |
| Pumping package: | Dry, oil-free, roughing pump (36 CFM) and high-vacuum turbo pump |
| Cart: | Carbon steel (painted) with locking swivel casters |
| System Power: | 240 VAC | 60Hz | 3 phase |
For ultimate flexibility and control of your vacuum system, the feature-packed VC-3500 Vacuum Controller provides automated vacuum control with customizable software and test recipes for your unique and complex vacuum processes. Capable of vacuum applications incorporating both single pumps and multiple pump high vacuum systems, the VC-3500 integrates vacuum gauges and valves for either automated mode or interlocked manual mode operation.
