Custom Solution | Dual Door R&D Vacuum System

SKU:

X-1P30576

Semiconductor company required a vacuum system to move parts in and out of a clean environment. The customer part (a welding enclosure purged with nitrogen) required an interlocked system so the part can pass through the chamber without compromising the nitrogen purge.

We engineered a custom vacuum system with a custom cube chamber featuring dual doors (room side door and weld side door) with proximity sensors and interlocks to ensure a clean environment. When the part enters the chamber through the room side door, the chamber evacuates to 0.1 Torr and is then backfilled with nitrogen.

  • Dual door chamber includes proximity sensors and interlocks to prevent both doors from being open at the same time
  • VC-2500 Vacuum Controller
  • Nitrogen backfill port and pressure relief port
Chamber Dimensions: 12″ H x 12″ W x 18″ L Cube (Internal Dimensions)
Chamber: Custom Series CH LVC121218-3322-CH
Chamber Material: 304 Stainless Steel
Door Material: 304 Stainless Steel
Seal: Buna O-ring
Vacuum Port: NW 25
Vent Port: NW 25
Gauge Port NW 16
Door Configuration: Plate hinge
Vacuum Rating: 1 x 10-3 Torr
Door Style: Flat plate
Controller: VC-2500 Vacuum Controller
Pumping System: W2V40 LACO two-stage oil-sealed rotary vane high vacuum pump

 

VC-2500 Vacuum Controller

The VC-2500 Vacuum Controller is a cost-effective vacuum system automation solution for applications such as vacuum degassing, altitude simulation and product testing. Featuring software that enables unique test recipes for your application requirements, the VC-2500 provides flexible control of single pump vacuum systems. The VC-2500 integrates the vacuum transducer with the vacuum and vent valves for automated operation.

W2V40 14 CFM Two Stage Rotary Vane Pump

The W2V40 rotary vane vacuum pump features a rugged, two-stage, air-cooled design and is capable of pumping speeds of 14 cfm and producing an ultimate vacuum of 10-3 Torr. Lightweight, quiet, and compact, the W2V40 has an anti-suckback and gas...

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