Custom Solution | 36″ Cube Vacuum Chamber for Semiconductor Manufacturing

SKU:

X-1P34317

An innovative manufacturer of Semi Conductors required a custom High Vacuum Cube Chamber with front-loading, hinged door capable of testing its products

LACO’s talented engineers designed a custom system that utilizes our 36“ Cube High Vacuum Chamber with numerous ports and feedthroughs, 6″ ISO Borosilicate glass view and support feet for mounting on a tabletop or customized LACO cart.

Custom Solution | 36″ Cube Vacuum Chamber for Semiconductor Manufacturing

Custom Solution | 36″ Cube Vacuum Chamber for Semiconductor Manufacturing image 1

Custom Solution | 36″ Cube Vacuum Chamber for Semiconductor Manufacturing image 2

IndustriesSemiconductor

Chamber Configuration: 36” cube high-vacuum, stainless steel chamber with 6-inch glass viewport
Chamber Ports: NW25, NW40, ISO160, and CF2.75
System Configuration: Carbon steel (painted) mobile cart with locking swivel casters
System Platform: Left-hand, front-loading design with support feet for mounting on a tabletop or customized LACO cart

Chamber Dimension	36″ W x 36″ H x 36″ D \| Series CH Cube High Vacuum Chamber
Chamber Material	304 Stainless steel w/swing hinge stainless steel door
Approximate Volume	46,656 in³
Vacuum Rating	1 x 10^-5Torr
Chamber Seal	Viton O-ring
Chamber Ports	NW25, NW40, ISO160, CF 2.75
Viewports	6” Borosilicate glass
Leak Rate	1 x10^-8 atm cc/sec (helium)
Pumping package	Leybold Turbovac 450i Turbo and Rough/backing pump
Cart	Carbon steel (painted) with locking swivel casters
System Power	120 VAC \| 60Hz \| Single phase \| 20 amp breaker

IndustriesSemiconductor

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All prices are in US$. Website pricing is good only for the USA. Please call for International pricing.

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Glass bead blasted 304 stainless steel body and door
Vacuum performance down to 1 x 10^-3 Torr with appropriate vacuum pump, contact LACO for deeper vacuum levels
Three standard NW ports:1ea NW16, and 2ea NW 25 Ports with clamp, centering ring and blankoff.
Helium leak tested to 10^-8 atm-cc/sec for quality assurance
Includes fully wood crate for shipping chamber safely and efficiently to customer destination.

All prices are in US$. Website pricing is good only for the USA. Please call for International pricing.

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Designs that include ports that will not crack or leak over time
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Additional ports
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Shelf brackets and shelves
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Helium leak tested for quality assurance
Certificate of Conformance to verify chamber is capable of full vacuum with a reported helium leak rate
Designs that include ports that will not crack or leak over time
FEA analysis on every chamber to guarantee chamber is structurally sound for full vacuum

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Additional ports
Hinged or clamped Lid
Shelf brackets and shelves
Feedthroughs:
- Liquid dip tube
- Electrical
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Vacuum pumps
Vacuum gauges
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Production cart or countertop baseplate
Internal mixers
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Vertical cylindrical, top-loading design
View your application through a clear acrylic lid
Includes three ports: vacuum port with manual ball valve, vent port with manual ball valve, and 0-30 inHg vacuum gauge
Helium leak tested for quality assurance

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View your application through a clear acrylic lid
Includes three ports: vacuum port with manual ball valve, vent port with manual ball valve, and 0-30 inHg vacuum gauge
Helium leak tested for quality assurance

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24″ X 16″ Vertical Industrial (VI) Vacuum Chamber (Hinged Lid)

Vertical cylindrical, top-loading design
View your application through a clear acrylic lid
Includes three ports: vacuum port with manual ball valve, vent port with manual ball valve, and 0-30 inHg vacuum gauge
Helium leak tested for quality assurance

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18″ X 12″ Vertical High (VH) Vacuum Chamber

Top-loading design with removable lid
Stainless steel body/lid with glass bead blast finish
Vacuum performance down to 1 x 10^-6 Torr with the appropriate vacuum pumps
Three standard NW ports: vacuum port with manual ball valve, vent port with manual ball valve, and 0-30 inHg vacuum gauge

Vertical Cylindrical Vacuum Chambers

18″ X 12″ Vertical High (VH) Vacuum Chamber (Hinged Lid)

Top-loading design with hinged lid
Stainless steel body/lid with glass bead blast finish
Vacuum performance down to 1 x 10^-6 Torr with the appropriate vacuum pumps
Three standard NW ports: vacuum port with manual ball valve, vent port with manual ball valve, and 0-30 inHg vacuum gauge

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24″ X 16″ Vertical High (VH) Vacuum Chamber

Top-loading design with removable lid
Stainless steel body/lid with glass bead blast finish
Vacuum performance down to 1 x 10^-6 Torr with the appropriate vacuum pumps
Three standard NW ports: vacuum port with manual ball valve, vent port with manual ball valve, and 0-30 inHg vacuum gauge

Vertical Cylindrical Vacuum Chambers

24″ X 16″ Vertical High (VH) Vacuum Chamber (Hinged Lid)

Top-loading design with hinged lid and clamps
Stainless steel body/lid with glass bead blast finish
Vacuum performance down to 1 x 10^-6 Torr with the appropriate vacuum pumps
Three standard NW ports: vacuum port with manual ball valve, vent port with manual ball valve, and 0-30 inHg vacuum gauge

Vertical Cylindrical Vacuum Chambers

24″ X 24″ Vertical High (VH) Vacuum Chamber

Top-loading design with removable lid
Stainless steel body/lid with glass bead blast finish
Vacuum performance down to 1 x 10^-6 Torr with the appropriate vacuum pumps
Three standard NW ports: vacuum port with manual ball valve, vent port with manual ball valve, and 0-30 inHg vacuum gauge

Vertical Cylindrical Vacuum Chambers

24″ X 24″ Vertical High (VH) Vacuum Chamber (Hinged Lid)

Top-loading design with hinged lid and clamps
Stainless steel body/lid with glass bead blast finish
Vacuum performance down to 1 x 10^-6 Torr with the appropriate vacuum pumps
Three standard NW ports: vacuum port with manual ball valve, vent port with manual ball valve, and 0-30 inHg vacuum gauge

Vertical Cylindrical Vacuum Chambers

30″ X 30″ Vertical Large (VL) Vacuum Chamber

Standard lift and swing lid
Vacuum Rating: Down to 0.05 Torr
Three ports: vacuum port with manual ball valve, vent port with manual ball valve, and 0-30 inHg vacuum gauge
All chambers include leg supports for mounting
304 stainless steel body construction
L-Gasket seals
Helium leak tested for quality assurance

Vertical Cylindrical Vacuum Chambers

36″ X 36″ Vertical Large (VL) Vacuum Chamber

Standard lift and swing lid
Vacuum Rating: Down to 0.05 Torr
Three ports: vacuum port with manual ball valve, vent port with manual ball valve, and 0-30 inHg vacuum gauge
All chambers include leg supports for mounting
304 stainless steel body construction
L-Gasket seals
Helium leak tested for quality assurance

Vertical Cylindrical Vacuum Chambers

48″ X 48″ Vertical Large (VL) Vacuum Chamber

Standard lift and swing lid
Vacuum Rating: Down to 0.05 Torr
Three ports: vacuum port with manual ball valve, vent port with manual ball valve, and 0-30 inHg vacuum gauge
All chambers include leg supports for mounting
304 stainless steel body construction
L-Gasket seals
Helium leak tested for quality assurance

Vertical Cylindrical Vacuum Chambers

18″ X 20″ Aluminum Vertical Industrial (VI) Vacuum Chamber (Hinged Lid)

Vertical cylindrical, top-loading design
View your application through a clear acrylic lid
Includes three ports: vacuum port with manual ball valve, vent port with manual ball valve, and 0-30 inHg vacuum gauge
Helium leak tested for quality assurance

Horizontal Cylindrical Vacuum Chambers

30″ X 36″ Horizontal Industrial (HI) Vacuum Chamber

Vacuum down to 10^-3 Torr
Front-loading, hinged door design
Stainless steel body/door with glass bead blast finish
Includes three ports: 3/4″ vacuum inlet port with manual ball valve, 1/2″ vent port with manual ball valve, and 1/4″ gauge port 0-30 inHg vacuum gauge
Cradle type support feet

CUSTOM OPTIONS

Add internal tray brackets, shelves, SS door, viewports, additional ports, feedthroughs and extruded aluminum carts.

All LACO vacuum chambers are helium leak tested for quality assurance and each includes a certificate verifying leak testing. LACO will customize port locations for your specific application needs. Please contact our applications engineers to discuss any questions, special requirements or application support you may require.

Horizontal Cylindrical Vacuum Chambers

36″ X 40″ Horizontal Industrial (HI) Vacuum Chamber

Vacuum down to 10^-3 Torr
Front-loading, hinged door design
Stainless steel body/door with glass bead blast finish
Includes three ports: 3/4″ vacuum inlet port with manual ball valve, 3/4″ vent port with manual ball valve, and 1/4″ gauge port 0-30 inHg vacuum gauge
Cradle type support feet

CUSTOM OPTIONS

Add internal tray brackets, shelves, SS door, viewports, additional ports, feedthroughs and extruded aluminum carts.

Horizontal Cylindrical Vacuum Chambers

48″ X 50″ Horizontal Industrial (HI) Vacuum Chamber

Vacuum down to 10^-3 Torr
Front-loading, hinged door design
Stainless steel body/door with glass bead blast finish
Includes three ports: 3/4″ vacuum inlet port with manual ball valve, 3/4″ vent port with manual ball valve, and 1/4″ gauge port 0-30 inHg vacuum gauge
Cradle type support feet

CUSTOM OPTIONS

Add internal tray brackets, shelves, SS door, viewports, additional ports, feedthroughs and extruded aluminum carts.

Horizontal Cylindrical Vacuum Chambers

12″ X 18″ Horizontal High (HH) Vacuum Chamber (Hinged Door with O-ring)

Horizontal cylindrical, front-loading design
Glass bead blasted 304 stainless steel body and door
Vacuum performance down to 1 x 10^-6 Torr with the appropriate vacuum pumps
Three standard NW ports: vacuum port with manual ball valve, vent port with manual ball valve, and 0-30 inHg vacuum gauge
Helium leak tested for quality assurance

Horizontal Cylindrical Vacuum Chambers

18″ X 20″ Horizontal High (HH) Vacuum Chamber (Hinged Door with O-ring)

Horizontal cylindrical, front-loading design
Glass bead blasted 304 stainless steel body and door
Vacuum performance down to 1 x 10^-6 Torr with the appropriate vacuum pumps
Three standard NW ports: vacuum port with manual ball valve, vent port with manual ball valve, and 0-30 inHg vacuum gauge
Helium leak tested for quality assurance

Horizontal Cylindrical Vacuum Chambers

30″ X 36″ Horizontal High (HH) Vacuum Chamber (Hinged Door with O-ring)

Horizontal cylindrical, front-loading design
Glass bead blasted 304 stainless steel body and door
Vacuum performance down to 1 x 10^-6 Torr with the appropriate vacuum pumps
Three standard NW ports: vacuum port with manual ball valve, vent port with manual ball valve, and 0-30 inHg vacuum gauge
Helium leak tested for quality assurance

Horizontal Cylindrical Vacuum Chambers

36″ X 40″ Horizontal High (HH) Vacuum Chamber (Hinged Door with O-ring)

Horizontal cylindrical, front-loading design
Glass bead blasted 304 stainless steel body and door
Vacuum performance down to 1 x 10^-6 Torr with the appropriate vacuum pumps
Three standard NW ports: vacuum port with manual ball valve, vent port with manual ball valve, and 0-30 inHg vacuum gauge
Helium leak tested for quality assurance