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Vacuum Chambers:
Series HU Ultra High Vacuum Chambers
Description Part of LACO Technologies' High Vacuum Chamber group, our Series HU high vacuum chambers are designed for vacuum levels below 10-9 torr and are ideal for a variety of high vacuum applications where extreme cleanliness and ultimate vacuum performance are required. Constructed with a stainless steel body and door with metal gasket door seals, we offer sizes ranging from 12" to 26" OD and offer many custom options and accessories. All chamber ports must be specified for the chamber (only metal sealed [CF style] ports are recommended). Contact one of our applications engineers to discuss your application.
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Features
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SERIES HU
BENEFITS |
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Expert Direction. Selecting the right
vacuum
chamber can be challenging. At LACO, we promise quick responses to
your queries, and expert guidance in selecting the right vacuum
chamber for your application. |
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Great Product.
Series HU high
vacuum chambers are engineered for performance at ultra high vacuum.
With our attention to critical details required in manufacturing UHV
chambers, you'll be happy with both the performance and
the price. |
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Customer for Life.
When you
purchase one of our vacuum chambers, you receive both great product
and a staff of committed, knowledgeable engineers with expertise in a
wide range of vacuum applications. We are available both before and
after the sale to ensure your vacuum chamber performs to your
expectations. |
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SERIES HU STANDARD FEATURES |
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All standard chambers include the
following features. |
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Material |
304 stainless steel
body with glass bead blast finish |
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Seal |
Metal gasket door
seals |
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Ports |
All ports,
gauges, and valves are customer specified and ordered separately. |
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Specs & Ranges |
All chambers are
helium leak tested and guaranteed for vacuum performance down to 1x10-9
torr with appropriate vacuum pump.
See specific product descriptions
for precise size, volume, and weight dimensions |
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Sizes |
Standard chambers from 12" to 26"
OD |
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SERIES HU OPTIONS |
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If one of our
standard chambers doesn't meet your precise needs, it is economical to
modify one of our standard designs with the following options. |
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Dimensions |
Customize your chamber diameter and length |
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Ports |
Add extra ports for
feedthroughs and other accessories |
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Viewports |
Add a viewport for easier viewing |
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Seal Gaskets |
Contact us for seal gasket options |
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SERIES HU ACCESSORIES |
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Select from some of the many
accessories we offer to complete your vacuum system. Please
contact one of our application engineers to assist you in selecting your
accessories. |
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Controllers |
Manually control your vacuum level or select a fully automated Vacuum
Process Sequence Controller |
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Vacuum Pumps |
Select from a wide range of dry and oil-free vacuum pumps
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Vacuum Gauges |
If you need more performance than our standard vacuum gauge select from a
range of digital vacuum gauges with and without process control outputs
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Traps |
Our wide range of vacuum traps provide protection to your pumps for a
variety of applications. |
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Valves |
Select from a range of specialty valves for your vacuum system
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Feedthroughs |
Vacuum feedthroughs for mechanical, fluid, temperature, instrumentation, and
electrical power applications |
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Carts |
Complete your system with one of several models of vacuum chamber carts
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Heaters |
Contact us if you require internal lighting or heaters for your vacuum
chamber |
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SERIES HU
APPLICATIONS |
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Our Series HU Vacuum Chambers are
ideal for the following applications. |
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Plasma Processing and Research |
Semiconductor integrated circuit
processing |
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Thin Film
Coating |
PVD, CVD, etc. |
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Atmospheric
and Space Simulation |
Weather, aircraft, military,
space, or product testing applications |
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Gas and
Materials Analysis |
Gas and materials analysis such as
Mass Spectroscopy, etc. |
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Materials
Research and Processing |
Magnetic
Materials, Ferroelectrics/ Advanced Ceramics, Thin Films: Metals, Electronic
Materials, Diamond-Like Carbon, Bioceramics
Surface Morphology, and others |
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Vacuum Metallurgy and Joining Techniques |
Vacuum mettalurgy and joining,
such as brazing and welding |
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Product Environmental Testing |
Thermal, Electrical, Controlled
Atmosphere |
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Lab
Applications |
Laboratory or scientific
research and experiments |
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Additional Information
HIgh Vacuum Chamber Group Brochure (PDF)
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| Part Number |
Description |
| LVC1220-HU |
Series HU Horizontal Stainless Steel Ultra High Vacuum Chamber, 12" x 20" |
POR |
customer specified |
| LVC1620-HU |
Series HU Horizontal Stainless Steel Ultra High Vacuum Chamber, 16" x 20" |
POR |
customer specified |
| LVC2024-HU |
Series HU Horizontal Stainless Steel Ultra High Vacuum Chamber, 20" x 24" |
POR |
customer specified |
| LVC2624-HU |
Series HU Horizontal Stainless Steel Ultra High Vacuum Chamber, 26" x 24" |
POR |
customer specified |